TITLE

Deposition of amorphous BaTiO3 optical films at low temperature

AUTHOR(S)
Liu, W.-T.; Lakshmikumar, S.T.
PUB. DATE
August 1993
SOURCE
Applied Physics Letters;8/2/1993, Vol. 63 Issue 5, p574
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the deposition of amorphous barium titanate optical films at low temperature. Effects of ionized species on the packaging and formation of chemical bond in optical films; Details on the usage of reactive partially ionized beam technique; Use of Perkin Elmer spectrophotometer in analyzing optical transmission of the films.
ACCESSION #
4170300

 

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