Enhanced hydrogenation and acceptor passivation in Si by pressurized water boiling

Ohmura, Y.; Otomo, Y.
July 1995
Applied Physics Letters;7/3/1995, Vol. 67 Issue 1, p64
Academic Journal
Examines the use of pressurized water boiling (PWB) in accelerating hydrogenation and neutralization of B acceptors in silicon. Use of boron implanted wafers; Comparison of PWB with boiling at atmospheric pressure; Detection of infrared absorption of B-H stretching vibration.


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