Anisotropic roughness in Ge/Si superlattices

Headrick, R.L.; Baribeau, J.-M.
January 1995
Applied Physics Letters;1/2/1995, Vol. 66 Issue 1, p96
Academic Journal
Focuses on the characterization of the interface and surface microroughness in a Ge/Si superlattice with a Si cap layer. Evidence for anisotropic vertical correlation of interface roughness; Comparison between interface structure and atomic force microscopy characterization of morphology of the Si cap layer overlying buried structures; Use of x-ray reflectivity.


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