TITLE

Substrate orientation dependence of low-temperature GaAs grown by molecular beam epitaxy

AUTHOR(S)
Cheng, T.M.; Chang, C.Y.
PUB. DATE
January 1995
SOURCE
Applied Physics Letters;1/2/1995, Vol. 66 Issue 1, p55
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines substrate orientation effect on crystalline quality of gallium arsenide grown by molecular beam epitaxy at low substrate temperature. Use of double crystal x-ray diffractometer and transmission electron microscopy; Correlation of crystal quality with substrate orientations; Significance of surface kinetic factors during low temperature growth.
ACCESSION #
4167652

 

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