Substrate orientation dependence of low-temperature GaAs grown by molecular beam epitaxy

Cheng, T.M.; Chang, C.Y.
January 1995
Applied Physics Letters;1/2/1995, Vol. 66 Issue 1, p55
Academic Journal
Examines substrate orientation effect on crystalline quality of gallium arsenide grown by molecular beam epitaxy at low substrate temperature. Use of double crystal x-ray diffractometer and transmission electron microscopy; Correlation of crystal quality with substrate orientations; Significance of surface kinetic factors during low temperature growth.


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