Generation of diamond nuclei on amorphous SiO[sub 2] by alternating-current bias microwave

Mao, M.Y.; Jin, X.F.
January 1995
Applied Physics Letters;1/2/1995, Vol. 66 Issue 1, p16
Academic Journal
Examines the nucleation of diamond on the amorphous SiO[sub 2] mirror surface by alternating current bias microwave plasma chemical vapor deposition (MPCVD). Relevance of the nucleation process to the preparation of diamond films; Influence of ac signal frequency on diamond nucleation; Method of adding an ac signal to the negative dc bias in MPCVD.


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