Apparent and true feature heights in force microscopy

Burnham, N.A.
July 1993
Applied Physics Letters;7/5/1993, Vol. 63 Issue 1, p114
Academic Journal
Examines how to convolute the cantilever stiffness from measured atomic force microscopy data to obtain true force curves and feature height of high resolution-imaged surfaces. Impact of cantilever beam convolution on true force curves; Relationship of the measured feature height to the true feature height; Collection of the imaging to determine the true feature height.


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