TITLE

Apparent and true feature heights in force microscopy

AUTHOR(S)
Burnham, N.A.
PUB. DATE
July 1993
SOURCE
Applied Physics Letters;7/5/1993, Vol. 63 Issue 1, p114
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines how to convolute the cantilever stiffness from measured atomic force microscopy data to obtain true force curves and feature height of high resolution-imaged surfaces. Impact of cantilever beam convolution on true force curves; Relationship of the measured feature height to the true feature height; Collection of the imaging to determine the true feature height.
ACCESSION #
4167584

 

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