New contacting technique for thin film resistance measurements perpendicular to the film plane

Gijs, M.A.M.; Giesbers, J.B.
July 1993
Applied Physics Letters;7/5/1993, Vol. 63 Issue 1, p111
Academic Journal
Examines the fabrication of gold thin film structures for resistance measurements with the use of microlithography. Illustration of thin film contacting geometry to measure ultralow perpendicular thin film resistances; Effects of measuring current on voltage drop; Distribution of electric field in current flow.


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