TITLE

New contacting technique for thin film resistance measurements perpendicular to the film plane

AUTHOR(S)
Gijs, M.A.M.; Giesbers, J.B.
PUB. DATE
July 1993
SOURCE
Applied Physics Letters;7/5/1993, Vol. 63 Issue 1, p111
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the fabrication of gold thin film structures for resistance measurements with the use of microlithography. Illustration of thin film contacting geometry to measure ultralow perpendicular thin film resistances; Effects of measuring current on voltage drop; Distribution of electric field in current flow.
ACCESSION #
4167583

 

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