TITLE

Effect of hydrogen treatment upon silicon surface investigated with the multiple internal

AUTHOR(S)
Zhong, L.; Ling, L.
PUB. DATE
July 1993
SOURCE
Applied Physics Letters;7/5/1993, Vol. 63 Issue 1, p99
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the effect of hydrogen treatment on crystalline silicon (Si) surface properties using reflection infrared spectroscopy. Shift of longitudinal-optical (LO) mode absorption in hydrogen treated samples; Relationship of LO mode with the change in Si-Si distance: Impact of hydrogen treatment on Si-Si distance in native oxide.
ACCESSION #
4167579

 

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