Electrical characteristics of a stacked nitride/microcrystalline-silicon/oxide/silicon structure

Shye Lin Wu; Chung Len Lee
July 1993
Applied Physics Letters;7/5/1993, Vol. 63 Issue 1, p24
Academic Journal
Examines the electrical characteristics of stacked nitride/microcrystalline-silicon/oxide/silicon (N/micro S/O/S) capacitor. Fabrication of N/microS/O/S capacitor on p-type silicon wafers; Determination of the oxide thickness in capacitors by capacitance-voltage measurements; Electron conduction efficiency of the capacitor.


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