TITLE

Low-energy Ar[sup +] ion bombardment-induced modification of surface atomic bond lengths on

AUTHOR(S)
Mangat, P.S.; Soukiassian, P.
PUB. DATE
October 1993
SOURCE
Applied Physics Letters;10/4/1993, Vol. 63 Issue 14, p1957
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates low-energy argon ion bombardment-induced modification of surface atomic bond lengths on indium phosphide/InP(100) wafer. Relevance of the low-energy beam of ions and surface in monitoring ion sputtering for surface preparation; Inclusions of the surface structural changes at a surface; Ways to characterize the effect of Argon sputtering.
ACCESSION #
4164263

 

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