Room-temperature luminescence from Er-implanted semi-insulating polycrystalline silicon

Lombardo, S.; Campisano, S.U.
October 1993
Applied Physics Letters;10/4/1993, Vol. 63 Issue 14, p1942
Academic Journal
Investigates room-temperature luminescence from Erbium-implanted semi-insulating polycrystalline silicon (SIPOS) films. Components of SIPOS; Ways to achieve light emission from silicon; Effects of annealing the crystals up to 500 degrees Celsius.


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