TITLE

Laser annealing of SrTiO[sub 3] thin films deposited directly on Si substrates at low temperature

AUTHOR(S)
Otani, Seigen; Kimura, Mami
PUB. DATE
October 1993
SOURCE
Applied Physics Letters;10/4/1993, Vol. 63 Issue 14, p1889
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Focuses on the laser annealing of SrTiO[sub 3] (strontium titanate) thin films deposited directly on Si (silicon) substrates at low temperature. Effects of laser annealing; Function of laser power; Importance of dynamic random access memory capacitors.
ACCESSION #
4164240

 

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