Nanograin crystalline transformation enhanced UV transparency of annealing refined indium tin oxide film

Wei-Lun Hsu; Yi-Hao Pai; Fan-Shuen Meng; Chee-Wee Liu; Gong-Ru Lin
June 2009
Applied Physics Letters;6/8/2009, Vol. 94 Issue 23, p231906
Academic Journal
This work investigates enhancing UV transmittance and resistivity of indium tin oxide (ITO) film via nanograin crystalline transformation. After annealing, the ITO transforms its crystallinity from amorphous to columnar nanograins, and enriches the Sn–O bonds with absorption at 572 cm-1 to greatly reduce its resistivity to 1.2×10-4 Ω cm. Long-term annealing beyond 475 °C transforms ITO crystallinity to equiaxed nanograins, promoting high UV transmittance of 50%–76% at 325–405 nm but increasing resistivity up to 1.6×10-3 Ω cm. A compromised UV transmittance of >50% and resistivity of <2×10-4 Ω cm can be simultaneously achieved in annealed ITO with hybrid crystallinity of columnar and equiaxed grains.


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