Improving lateral resolution of electrostatic force microscopy by multifrequency method under ambient conditions

Ding, X. D.; An, J.; Xu, J. B.; Li, C.; Zeng, R. Y.
June 2009
Applied Physics Letters;6/1/2009, Vol. 94 Issue 22, p223109
Academic Journal
A multifrequency scanning probe technique which can enhance the spatial resolution of electrostatic force microscopy (EFM) in amplitude-modulation mode under ambient conditions is demonstrated. The first eigenmode of a cantilever is used for topographic imaging, while the second eigenmode is resonantly excited with a sinusoidal modulation voltage applied to the cantilever to measure electrostatic force in lift mode. Two-dimensional images and spectra of electrostatic force are obtained. The lateral resolution of the multifrequency EFM is demonstrated to be better than 15 nm and a theoretical explanation is postulated.


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