Real-time in situ spectroscopic ellipsometry of GaSb nanostructures during sputtering

Nerbø, I. S.; Le Roy, S.; Kildemo, M.; Søndergård, E.
May 2009
Applied Physics Letters;5/25/2009, Vol. 94 Issue 21, p213105
Academic Journal
We demonstrate that real-time in situ spectroscopic ellipsometry can be used to measure the height evolution of nanostructures during low energy ion sputtering of GaSb. A graded anisotropic effective medium approximation is used to extract the height from the optical measurements. Two different growth regimes have been observed, first exponential then followed by a linear regime. The linear regime is not expected from the traditional sputtering theories. The in situ results correspond well to ex situ atomic force microscopy measurements.


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