TITLE

Reconstruction of ion energy distribution function in a capacitive rf discharge

AUTHOR(S)
Chen, W. C.; Zhu, X. M.; Zhang, S.; Pu, Y. K.
PUB. DATE
May 2009
SOURCE
Applied Physics Letters;5/25/2009, Vol. 94 Issue 21, p211503
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A simple one-dimensional ion dynamic model with charge exchange collisions as the predominant ion-neutral reactions in the sheath is used to obtain the ion energy distribution function (IEDF) in a single-frequency collisional capacitive argon discharge. The shape of IEDF strongly depends on the electron density in this model. IEDFs predicted by this model can be in good agreement with those measured by adjusting the electron density at the ion sheath boundary. The electron densities obtained in this way are in good agreement with those from optical emission spectroscopy measurement, which also indicates the validity of the model.
ACCESSION #
40637706

 

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