Reconstruction of ion energy distribution function in a capacitive rf discharge

Chen, W. C.; Zhu, X. M.; Zhang, S.; Pu, Y. K.
May 2009
Applied Physics Letters;5/25/2009, Vol. 94 Issue 21, p211503
Academic Journal
A simple one-dimensional ion dynamic model with charge exchange collisions as the predominant ion-neutral reactions in the sheath is used to obtain the ion energy distribution function (IEDF) in a single-frequency collisional capacitive argon discharge. The shape of IEDF strongly depends on the electron density in this model. IEDFs predicted by this model can be in good agreement with those measured by adjusting the electron density at the ion sheath boundary. The electron densities obtained in this way are in good agreement with those from optical emission spectroscopy measurement, which also indicates the validity of the model.


Related Articles

  • Time-resolved optical emission and electron energy distribution function measurements in rf plasmas. Stalder, K. R.; Anderson, C. A.; Mullan, A. A.; Graham, W. G. // Journal of Applied Physics;8/15/1992, Vol. 72 Issue 4, p1290 

    Compares the measured time-dependent electron energy distribution functions and the optical emission intensities for low-frequency radio-frequency driven discharges in argon. Description of the experimental apparatus; Information on the Langmuir probe system; Details on the optical collection...

  • Electron-density and energy distributions in a planar inductively coupled discharge. Mahoney, Leonard J.; Wendt, Amy E.; Barrios, Ernesto; Richards, Carolyn J.; Shohet, J. Leon // Journal of Applied Physics;8/15/1994, Vol. 76 Issue 4, p2041 

    Discusses a study which dealt with electron-density and energy distributions in a planar inductively coupled discharge. Use of radio frequency-filtered Langmuir probes; Range of electron densities; Technology considered promising for etching and deposition processes.

  • Transport in a gated Al[sub 0.18]Ga[sub 0.82]N/GaN electron system. Juang, J. R.; Tsai-Yu Huang, J. R.; Tse-Ming Chen, J. R.; Ming-Gu Lin, J. R.; Gil-Ho Kim; Y. Lee; Liang, C. T.; Hang, D. R.; Chen, Y. F.; Jen-Inn Chyi // Journal of Applied Physics;9/1/2003, Vol. 94 Issue 5, p3181 

    We have investigated the low-temperature transport properties of front-gated Al[sub 0.18]Ga[sub 0.82]N/GaN heterostructures. At zero gate voltage, the Hall mobility increases with decreasing temperature (20 K≤T≤190 K) due to a reduction in phonon scattering. For T≤20 K, the...

  • The distribution of velocities for Ba+ ions in Ar gas. Viehland, Larry A.; Hampt, Denise S. // Journal of Chemical Physics;10/1/1992, Vol. 97 Issue 7, p4964 

    The ground-state potential for singly-charged barium ions interacting with argon atoms is inferred from laser-induced fluorescence measurements of the gaseous ion transport coefficients. The potential is used to compute velocity component distribution functions and fluorescence spectra....

  • Spectral and Photometric Evolution of the Symbiotic Nova HM Sagittae in 1986–2002. Arkhipova, V. P.; Esipov, V. F.; Ikonnikova, N. P.; Noskova, R. I. // Astronomy Letters;Apr2004, Vol. 30 Issue 4, p258 

    We present the results of our photometric and spectroscopic observations of the symbiotic nova HM Sge in 1994–2002. After its outburst in 1975, the star was shown to fade in the U, B, V bands at a rate of about 0[magnitude_of_arc]5 per year. The behavior of the B–V and U–B...

  • Ultraviolet versus infrared: Effects of ablation laser wavelength on the expansion of laser-induced plasma into one-atmosphere argon gas. Ma, Qianli; Motto-Ros, Vincent; Laye, Fabrice; Yu, Jin; Lei, Wenqi; Bai, Xueshi; Zheng, Lijuan; Zeng, Heping // Journal of Applied Physics;Mar2012, Vol. 111 Issue 5, p053301 

    Laser-induced plasma from an aluminum target in one-atmosphere argon background has been investigated with ablation using nanosecond ultraviolet (UV: 355 nm) or infrared (IR: 1064 nm) laser pulses. Time- and space-resolved emission spectroscopy was used as a diagnostics tool to have access to...

  • Measured and simulated electron energy distribution functions in a low-pressure radio.... Turner, M.M.; Doyle, R.A.; Hopkins, M.B. // Applied Physics Letters;6/21/1993, Vol. 62 Issue 25, p3247 

    Examines the measured and simulated electron energy distribution functions in a low-pressure radio frequency discharge in argon. Use of a Langmuir probe system; Transition from a stochastic to an ohmic electron heating mode; Determination of characteristic scales by the electron plasma frequency.

  • Observations of bi-Maxwellian and single Maxwellian electron energy distribution functions in a capacitively coupled radio-frequency plasmas by laser Thomson scattering. Mansour ElSabbagh, M. A.; Bowden, M.D.; Uchino, K.; Muraoka, K. // Applied Physics Letters;5/21/2001, Vol. 78 Issue 21, p3187 

    Electron energy distribution functions in low-pressure capacitively coupled radio-frequency argon discharges were measured using the technique of laser Thomson scattering. It was found that the distribution functions changed from a bi-Maxwellian at lower pressures to a single Maxwellian at...

  • Ion energy distributions in dual- and single-mode microwave/radio-frequency plasma. Reinke, P.; Bureau, S.; Klemberg-Sapieha, J. E.; Martinu, L. // Journal of Applied Physics;10/15/1995, Vol. 78 Issue 8, p4855 

    Presents information on a study which measured the ion energy distribution functions at the surface of a grounded or a radio frequency-powered electrode exposed to a microwave or a radio frequency discharge in argon. Methods; Results; Discussion.


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics