Radio frequency nanowire resonators and in situ frequency tuning

Fung, Wayne Y.; Dattoli, Eric N.; Wei Lu
May 2009
Applied Physics Letters;5/18/2009, Vol. 94 Issue 20, p203104
Academic Journal
We report the fabrication and characterization of radio frequency nanoelectromechanical resonators based on semiconductor nanowires with a dual-gate configuration. Suspended nanowire resonators were fabricated with little residual tension using a dry transfer method and lithographically defined metal electrodes. Fundamental flexural modes of the nanowire resonators were actuated and detected electrically at room temperature using the on-chip gates and a mixing circuit. The dual-gate setup in turn enabled us to tune the nanowire resonant frequency up or down in situ through elastic hardening and capacitive softening effects, respectively. Selective actuation of the out-of-plane or the in-plane vibrational mode was also reported.


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