Development of a dielectric-barrier discharge enhanced microplasma jet

Kiriu, Shinya; Miyazoe, Hiroyuki; Takamine, Fumitoshi; Sai, Masaki; Jai Hyuk Choi; Tomai, Takaaki; Terashima, Kazuo
May 2009
Applied Physics Letters;5/11/2009, Vol. 94 Issue 19, p191502
Academic Journal
A low-power ultrahigh-frequency-driven inductively coupled microplasma (ICMP) source equipped with dielectric-barrier discharge (DBD) was developed to realize a low-temperature and high-density plasma in fine quartz capillaries with inner diameters of less than 1.0 mm. A stable plasma was generated and its sustainability was independent of the gas flow rate. This plasma jet had a longer plume than that of a thermoelectron-enhanced microplasma jet, and time-resolved characterization suggested interactions between ICMP and DBD jets. By optical emission spectroscopy characterization, the gas temperature and electron density inside a capillary were estimated to be 400–1000 K and 1013–1014 cm-3, respectively.


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