TITLE

Backside observation of large-scale integrated circuits with multilayered interconnections using laser terahertz emission microscope

AUTHOR(S)
Yamashita, Masatsugu; Otani, Chiko; Kawase, Kodo; Matsumoto, Toru; Nikawa, Kiyoshi; Kim, Sunmi; Murakami, Hironaru; Tonouchi, Masayoshi
PUB. DATE
May 2009
SOURCE
Applied Physics Letters;5/11/2009, Vol. 94 Issue 19, p191104
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We have developed a laser terahertz emission microscope utilizing excitation laser pulses at 1.06 μm wavelength for the inspection and localization of electrical failures in large-scale integrated circuits with multilayered interconnection structures. The system enables to measure terahertz emission images from the backside of a large-scale integrated circuits chip with a multilayered interconnection structure that prevents the observation from the front side. By comparing the terahertz emission images, we successfully distinguish a normal circuit from damaged ones with different positions of the interconnection defects without any electrical probing.
ACCESSION #
39785851

 

Related Articles

  • Compact Triple Step-Down Regulator Offers LDO Driver and Output Tracking and Sequencing. Zhou, Tiger // EDN Europe;Oct2008, Vol. 55 Issue 10, p83 

    The article offers information on the features of compact triple step-down regulator LT3507. It states that LT3507 is a single integrated circuit current mode triple step down regulator with internal power switches and low dropout linear regulator driver. It switching frequency is set with a...

  • To integrate or not to integrate, that is the analogue-digital question. Sullivan, Chris // Electronics Weekly;11/27/2013, Issue 2569, p16 

    The article presents information on analogue integration circuits. It states that though, analogue integration circuits are cost effective and powerful, but their combination with digital integrated circuit (IC) substrate can affect performance. It also mentions about increasing integration in...

  • STEP-DOWN REGULATORS --PART 2: BATTERY-POWERED APPLICATIONS. Davis, Sam // Electronic Design;10/18/2004, Vol. 52 Issue 23, preceding p1 

    This article guides on battery-powered applications of step down regulators. Integrated Circuits (IC) operating voltages are decreasing relative to battery output voltages. A single Li-ion battery output can reach 4.2 V, and three new alkaline cells can produce 4.5 V. The switch-mode regulator...

  • The Effects of Boron in the Cu(B)/Ti/SiO2 System on the Cu-Ti Reaction, Resistivity, and Diffusion Barrier Properties. Yang, H. J.; Lee, S.; Park, J. B.; Lee, H. M.; Lee, E. G.; Lee, C. M.; Hong, H. N.; Mori, S.; Lee, J. H.; Lee, J. G. // Journal of Electronic Materials;May2005, Vol. 34 Issue 5, p643 

    The behavior of boron in Cu(4.8at.%B)/Ti/SiO2 was investigated as a function of temperature, and its influences on the Cu-Ti interaction, resistivity, and diffusion barrier properties were also studied. The results showed the formation of a titanium boride layer at the Cu-Ti interface, after...

  • UNDER THE LID. WILSON, RON // EDN;1/7/2010, Vol. 55 Issue 1, p24 

    The article discusses the costs and various digital and analog methods of testing integrated circuits (IC). While the cost of automatic-test-pattern generation (ATPB), built-in self-tests (BIST) and structural techniques have been under control, analog complexity continues to raise the cost of...

  • Clock-circuit-design tool recovers engineering time. Berman, Jeff; Granville, Fran; Gosmann, Angela // EDN Europe;Oct2005, Vol. 50 Issue 10, p16 

    Reports that Analog Devices has unveiled three clock integrated circuits and a simulation tool that aims to accelerate the design and analysis of clock circuits for various applications, including wireless transceivers, broadband-infrastructure equipment general instrumentation, and automated...

  • Predictability Comes To An IC Implementation Flow. Maliniak, David // Electronic Design;4/14/2005, Vol. 53 Issue 8, p34 

    This article discusses issues related to predictability in integrated circuits. In the summer of 2001, Atrenta arrived on the scene with tools based on what the company calls "predictive analysis" technology, which used rule checking to produce cleaner RTL. The tools comprise a unified physical...

  • Fully Integrated HBT MMIC Series-Type Extended Doherty Amplifier for W-CDMA Handset Applications. Chanhoe Koo; Junghyun Kim; Youngwoo Kwon // ETRI Journal;2010, Vol. 32 Issue 1, p151 

    A highly efficient linear and compactly integrated series-type Doherty power amplifier (PA) has been developed for wideband code-division multiple access handset applications. To overcome the size limit of a typical Doherty amplifier, all circuit elements, such as matching circuits and impedance...

  • Rectangular-waveform generator produces 25 and 75% duty cycles. Štofka, Marián // EDN Europe;May2010, Vol. 57 Issue 5, p23 

    The article reports that the rectangular waveform generator has produced duty cycles of both 25 and 75 percent. It mentions that the 25 percent of duty cycle can be generated by simply outputs. Further it also mentions that NAND gates integrated circuit (IC) generate the output waveform from the...

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics