TITLE

Quantitative optical recognition of highly reproducible ultrathin oxide films in microelectrochemical anodization

AUTHOR(S)
Mardare, Andrei Ionut; Hassel, Achim Walter
PUB. DATE
April 2009
SOURCE
Review of Scientific Instruments;Apr2009, Vol. 80 Issue 4, p046106
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Automatized microelectrochemical investigations are achieved using a scanning droplet cell. The area reproducibility for a 100 μm oxide spot is found to be better than 1%, a value typically difficult to reach even in macroscopic samples. A systematic change in color appearance is seen for oxide films with a thickness ranging from 14 to 27 nm. Analysis of optical images yields a strictly linear relation between relative transmission and anodization charge and thus allows determination of the oxide thickness with a remarkable precision better than 0.5 nm at an absolute film thickness value that is at least a factor of 20 smaller than the wavelength of light.
ACCESSION #
38611907

 

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