Stress field analysis to understand the breakdown characteristics of stacked high-k dielectrics

Lee, Byoung Hun; Kang, Changyong; Choi, Rino; Lee, Hi-Deok; Bersuker, Gennadi
April 2009
Applied Physics Letters;4/20/2009, Vol. 94 Issue 16, p162904
Academic Journal
The validity of the stress biases used in reliability studies of high-k dielectric is discussed by analyzing the stress biases used in previous works. For single layer dielectrics, stress biases near the time zero dielectric breakdown point have been used to reduce the test time. However, stacked dielectrics need a more careful approach to avoid overstress. We show that the majority of earlier work on the reliability of high-k dielectric used high electric field and those results may not be optimal for predicting intrinsic reliability characteristics. A simple guideline to avoid overstress is provided.


Related Articles

  • Mechanical constraints enhance electrical energy densities of soft dielectrics. Zhang, Lin; Wang, Qiming; Zhao, Xuanhe // Applied Physics Letters;10/24/2011, Vol. 99 Issue 17, p171906 

    Dielectrics are essential components in modern electronics and electric systems. When a sufficiently high voltage is applied on a layer of a dielectric, the dielectric will breakdown electrically. The breakdown limits the electrical energy density of the dielectric. We show that constraining the...

  • Scaling Law for a Low-Pressure Gas Breakdown in a Homogeneous DC Electric Field. Lisovsky, V. A.; Yakovin, S. D. // JETP Letters;7/25/2000, Vol. 72 Issue 2, p34 

    Gas breakdown in nitrogen, air, and oxygen in a dc electric field at various interelectrode distances L is studied experimentally. A scaling law for a low-pressure gas breakdown U[sub dc] =f(pL, L/R) is deduced. According to this scaling law, the breakdown voltage U[sub dc] is a function not...

  • Surface-related breakdown in silicon: Imaging of current filaments in long p[sup +]-n[sup -].... Hankla, B.J.; Williams, P.F. // Applied Physics Letters;12/25/1995, Vol. 67 Issue 26, p3942 

    Examines the current filaments in silicon during early stages of surface related breakdown in high electric fields. Use of a Schlieren photography variation and an infrared laser beam; Junction configurations utilized; Possible role of a streamerlike mechanism in the silicon breakdown.

  • Pre-breakdown currents in water and aqueous solutions and their influence on pulsed dielectric breakdown. Jones, H. M.; Kunhardt, E. E. // Journal of Applied Physics;9/1/1995, Vol. 78 Issue 5, p3308 

    Investigates the current response of water and sodium chloride solutions subjected to high amplitude electric fields of sub-microsecond duration. Influence of the sheath formation on the subsequent dielectric breakdown of water; Typical traces of the waveforms recorded by the probes; Features...

  • Numerical analysis of plasma evolution on dielectric barrier discharge plasma actuator. Nishida, Hiroyuki; Abe, Takashi // Journal of Applied Physics;Jul2011, Vol. 110 Issue 1, p013302 

    Time evolution of the discharge plasma in the dielectric barrier discharge (DBD) plasma actuator was simulated by the simple fluid model in which the electron and single positive ion species were considered. The characteristics of the discharge plasma evolution were investigated in detail, and...

  • Metallic wire structures under an intense electromagnetic field. Chui, S. T.; Zhang, Weiyi // Journal of Applied Physics;Oct2009, Vol. 106 Issue 7, p074904-1 

    We discuss the limitation of metallic wire structures as absorbers of high intensity electromagnetic radiation due to the large local electrical fields developed at junctions and free ends of the wires. We find that at resonance the breakdown external electric field applied to the body of the...

  • Laplacian Instability of Planar Streamer Ionization Fronts—An Example of Pulled Front Analysis. Derks, Gianne; Ebert, Ute; Meulenbroek, Bernard // Journal of Nonlinear Science;Oct2008, Vol. 18 Issue 5, p551 

    Streamer ionization fronts are pulled fronts that propagate into a linearly unstable state; the spatial decay of the initial condition of a planar front selects dynamically one specific long-time attractor out of a continuous family. A stability analysis for perturbations in the transverse...

  • The Presence of a Local Minimum in the Dependence of Breakdown Delay Time on Magnetic Field Strength. Kishov, K. M.-R.; Kishov, M.-R. G. // Plasma Physics Reports;Aug2004, Vol. 30 Issue 8, p714 

    The experimentally observed nonmonotonic dependence of the breakdown delay time on the magnetic field strength is analyzed theoretically. Calculations with allowance for both an increase in the electric field in the avalanche head because of the change in the diffusion coefficients and an...

  • Zener tunneling in conductive graphite/epoxy composites: Dielectric breakdown aspects. He, L. X.; Tjong, S. C. // Express Polymer Letters;2013, Vol. 7 Issue 4, p375 

    The electrical responses of conductive graphite/epoxy composites subjected to an applied electric field were investigated. The results showed that reversible dielectric breakdown can easily occur inside the composites even under low macroscopic field strengths. This is attributed to the Zener...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics