TITLE

Dielectric constant and leakage of BaZrO3 films

AUTHOR(S)
İupina, G.; Dąbrowsko, J.; Dudek, P.; Kozıowski, G.; Zaumseil, P.; Lippert, G.; Fursenko, O.; Bauer, J.; Baristiran, C.; Costina, I.; Müssig, H.-J.; Oberbeck, L.; Schröder, U.
PUB. DATE
April 2009
SOURCE
Applied Physics Letters;4/13/2009, Vol. 94 Issue 15, p152903
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Dielectric properties of thin (<30 nm) BaZrO3 perovskite layers deposited onto TiN were investigated. Polycrystalline films show a dielectric constant of ∼40 and an optical band gap of ∼5.4 eV. Leakage currents of the polycrystalline BaZrO3 films are significantly higher than that of the corresponding amorphous layers. As evidenced by conductive atomic force microscopy, secondary ion mass spectrometry, and ab initio calculations, these currents may be due to hot spots and point defects related to Ti contamination of the dielectrics.
ACCESSION #
37831828

 

Related Articles

  • Artificially engineered pyroelectric Sr[sub 1-x]Ba[sub x]TiO[sub 3] superstructure films. Wiener-Avnear, E. // Applied Physics Letters;10/3/1994, Vol. 65 Issue 14, p1784 

    Examines artificially engineered pyroelectric Sr[sub 1-x]Ba[sub x]TiO[sub 3] superstructure films. Performance of secondary-ion-mass-spectroscopy and x-ray diffraction measurements; Dependence of the real dielectric constant on temperature; Presence of a broad peak near the extrapolated Curie...

  • Concentration profiles of composing ions in radio frequency sputtered Sr (Zr0.2Ti0.8)O3 films. Matsuoka, Tomizo; Kuwata, Jun; Fujita, Yosuke; Abe, Atsushi // Journal of Applied Physics;10/1/1988, Vol. 64 Issue 7, p3512 

    Focuses on a study which described the novel phenomena and anomaly of the composing ions observed by the secondary ion mass spectrometry measurements in the Sr(Zr[sub0.2]Ti[sub0.8])O[sub3] films. Way of preparing the films; Use of thin films with high dielectric constants; Area where the...

  • Characterization of Silver Photodiffusion in Ge8Sb2Te11 Thin Films. Kumar, Sandeep; Singh, D.; Sandhu, S.; Thangaraj, R. // AIP Conference Proceedings;2015, Vol. 1665, p1 

    Silver-doped amorphous Ge8Sb2Te11 thin films have been prepared by photodiffusion at room-temperature; the Ge8Sb2Te11/Ag bilayer was deposited by vacuum thermal evaporation. Photodiffusion of Ag into the amorphous Ge8Sb2Te11 thin films has been carried out by illuminating the prepared...

  • Phosphorus and arsenic penetration studies through HfSi[sub x]O[sub y] and HfSi[sub x]O[sub y]N[sub z] films. Quevedo-Lopez, M. A.; El-Bouanani, M.; Kim, M. J.; Gnade, B. E.; Wallace, R. M.; Visokay, M. R.; Li-Fatou, A.; Bevan, M. J.; Colombo, L. // Applied Physics Letters;8/26/2002, Vol. 81 Issue 9, p1609 

    Phosphorus and arsenic penetration studies from P- and As-doped polycrystalline silicon through HfSi[sub x]O[sub y] and HfSi[sub x]O[sub y]N[sub z] (18% N) alternate gate dielectric candidates films into Si(100) are presented using a combination of chemical etching and secondary ion mass...

  • Isotope effects for mega-electron-volt boron ions in amorphous silicon. Svensson, B. G.; Ridgway, M. C.; Petravic, M. // Journal of Applied Physics;5/15/1993, Vol. 73 Issue 10, p4836 

    Presents information on a study which analyzed the depth profiles of [⊃10]boron (B) and [⊃11]B implanted into amorphous silicon, secondary ion mass spectrometry (SIMS). Features of the use of mega-electron-volt ions in semiconductor technology; SIMS analysis performed in a...

  • The effect of the surface layer of tetrahedral amorphous carbon films on their tribological and electron emission properties investigated by atomic force microscopy. Liu, Dongping; Benstetter, Günther; Frammelsberger, Werner // Applied Physics Letters;6/2/2003, Vol. 82 Issue 22, p3898 

    The nanowear resistance, tribological, and field emission properties of tetrahedral amorphous carbon (ta-C) films have been analyzed by atomic force microscope (AFM)-based wear testing technique, lateral force microscope, and conducting AFM. The ta-C films grown by filtered pulsed cathodic arc...

  • Surface evolution of amorphous nanocolumns of Fe–Ni grown by oblique angle deposition. Thomas, Senoy; Al-Harthi, S. H.; Ramanujan, R. V.; Zhao Bangchuan; Liu Yan; Wang Lan; Anantharaman, M. R. // Applied Physics Letters;2/9/2009, Vol. 94 Issue 6, pN.PAG 

    The growth of Fe–Ni based amorphous nanocolumns has been studied using atomic force microscopy. The root mean square roughness of the film surface increased with the deposition time but showed a little change at higher deposition time. It was found that the separation between the...

  • Correlation between diamond grain size and hydrogen retention in diamond films studied by scanning electron microscopy and secondary ion mass spectroscopy. Michaelson, Sh.; Ternyak, O.; Hoffman, A.; Lifshitz, Y. // Applied Physics Letters;1/15/2007, Vol. 90 Issue 3, p031914 

    The present work studies the incorporation of hydrogen in chemical vapor deposited polycrystalline diamond films with different grain sizes. Scanning electron microscopy and secondary ion mass spectroscopy were applied to investigate the film microstructure and hydrogen retention in the films,...

  • Properties of zirconia thin films deposited by laser ablation. Cancea, V. N.; Filipescu, M.; Colceag, D.; Mustaciosu, C.; Dinescu, M. // AIP Conference Proceedings;Nov2013, Vol. 1564 Issue 1, p138 

    Zirconia thin films have been deposited by laser ablation of a ceramic ZrO2 target in vacuum or in oxygen background at 0.01 mbar. The laser beam generated by an ArF laser (λ=193 nm, ν=40 Hz) has been focalized on the target through a spherical lens at an incident angle of 45°. The...

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics