High-Q terahertz microcavities in silicon photonic crystal slabs

Yee, Cristo M.; Sherwin, Mark S.
April 2009
Applied Physics Letters;4/13/2009, Vol. 94 Issue 15, p154104
Academic Journal
Photonic crystal cavities consisting of three holes missing along a principal axis in a triangular lattice of holes in a silicon slab were fabricated. Each cavity was built into a waveguide to form a Lorentzian filter. Two samples were constructed with lattice constants a=80 and 76 μm, with a radius r=0.30a in a 44 μm thick high-resistivity silicon wafer. Transmission experiment show a single sharp resonance near 1 THz in each sample with quality factor Q as high as 1020. Contributions to the measured Q from cavity-waveguide coupling, radiative loss, and material loss are determined.


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