TITLE

Electronic and structural properties of molybdenum thin films as determined by real-time spectroscopic ellipsometry

AUTHOR(S)
Walker, J. D.; Khatri, H.; Ranjan, V.; Li, Jian; Collins, R. W.; Marsillac, S.
PUB. DATE
April 2009
SOURCE
Applied Physics Letters;4/6/2009, Vol. 94 Issue 14, p141908
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Real-time spectroscopic ellipsometry (RTSE) is shown to be an effective contactless probe of radio frequency magnetron sputtered molybdenum thin films used as the back electrode in chalcopyrite [Cu(In,Ga)Se2] solar cells. A series of Mo thin films was sputtered onto soda-lime glass substrates at Ar pressures ranging from 4 to 20 mTorr. RTSE measurements reveal how Ar pressure affects the nucleation and growth mechanisms that influence the films’ ultimate grain structure and properties. Determinations of the free electron relaxation times at optical frequencies reveal that higher pressures lead to a smaller average grain size and increased void volume fraction.
ACCESSION #
37580333

 

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