TITLE

Self-excited nonlinear plasma series resonance oscillations in geometrically symmetric capacitively coupled radio frequency discharges

AUTHOR(S)
Donkó, Z.; Schulze, J.; Czarnetzki, U.; Luggenhölscher, D.
PUB. DATE
March 2009
SOURCE
Applied Physics Letters;3/30/2009, Vol. 94 Issue 13, p131501
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
At low pressures, nonlinear self-excited plasma series resonance (PSR) oscillations are known to drastically enhance electron heating in geometrically asymmetric capacitively coupled radio frequency discharges by nonlinear electron resonance heating (NERH). Here we demonstrate via particle-in-cell simulations that high-frequency PSR oscillations can also be excited in geometrically symmetric discharges if the driving voltage waveform makes the discharge electrically asymmetric. This can be achieved by a dual-frequency (f+2f) excitation, when PSR oscillations and NERH are turned on and off depending on the electrical discharge asymmetry, controlled by the phase difference of the driving frequencies.
ACCESSION #
37321918

 

Related Articles

  • Sealed efficient excilamps excited by a capacitive discharge. Lomaev, M. I.; Skakun, V. S.; Sosnin, É. A.; Tarasenko, V. F.; Shitts, D. V. // Technical Physics Letters;Nov99, Vol. 25 Issue 11, p858 

    The development of sealed XeCl (λ ∼ 308nm), KrCl (λ ∼ 222nm), and XeI (λ ∼ 253 nm) excilamps excited by a capacitive rf discharge is reported. It is shown that highly efficient emission of exciplex molecules is achieved under capacitive discharge excitation and the...

  • Nonlinear electron resonance heating in capacitive radio frequency discharges. Mussenbrock, Thomas; Brinkmann, Ralf Peter // Applied Physics Letters;4/10/2006, Vol. 88 Issue 15, p151503 

    Technological processing plasmas are frequently operated at relatively low gas pressure (<10 Pa). A characteristic feature of this regime is that collisions of the electrons with the atoms or molecules of the neutral background are relatively rare, and the so-called collisional or Ohmic heating...

  • Model of rf discharges at frequencies greater than the ionic plasma frequency. Pointu, A. M. // Applied Physics Letters;4/20/1987, Vol. 50 Issue 16, p1047 

    The extension of a previous model using an asymmetrical double-probe theory is set out to describe rf discharges in the opposite limit of mainly capacitive electrode sheaths. It reasonably agrees with available experimental results for an excitation frequency equal to or greater than 13.56 MHz.

  • Impact excitation of the f–f emission in clusters Er–O in silicon. Gerchikov, L. G.; Masterov, V. F. // Applied Physics Letters;7/27/1998, Vol. 73 Issue 4 

    The Er[sub 2]O[sub 3] quantum dot (cluster) with dimensions about 1.2 nm in silicon is discussed as a possible source of the Er-related emission in Si:Er, O, excited by hot carriers in the light-emitting diodes under reverse bias. This quantum dot is represented as a spherical quantum well 1 eV...

  • Electron Spin Resonance with g[sub eff]approx. 4.2 in YBa[sub 2]Cu[sub 3]O[sub 6.35]. Model of Chain Copper—Oxygen Fragments. Eremin, M. V.; Eremina, R. M.; Gafurov, M. R.; Ivan’shin, V. A.; Kurkin, I. N.; Kurzin, S. P.; Keller, H.; Gutmann, M. // Journal of Experimental & Theoretical Physics;Feb2000, Vol. 90 Issue 2, p363 

    Systematic measurements are made of ESR spectra with g ≈ 4.2 in YBa[sub 2]Cu[sub 3]O[sub 6+y] compounds with various doping indices y. Temperature dependences of the spectrum intensity show that the ground states of the centers are singlet and the energies of the excited states M[sub S] =...

  • Implementation of optically detected magnetic resonance spectroscopy in a commercial W-band cylindrical cavity. Janssen, G.; Bouwen, A.; Casteels, P.; Goovaerts, E. // Review of Scientific Instruments;Nov2001, Vol. 72 Issue 11, p4295 

    By means of a custom-made fiber bundle for optical excitation and light collection we demonstrate the feasibility of W-band (95 GHz) optically detected magnetic resonance spectroscopy using a commercial high-frequency electron paramagnetic resonance spectrometer with a standard cylindrical...

  • Nonthermal atmospheric rf plasma in one-dimensional spherical coordinates: Asymmetric sheath structure and the discharge mechanism. Sakiyama, Yukinori; Graves, David B. // Journal of Applied Physics;4/1/2007, Vol. 101 Issue 7, p073306 

    We present one-dimensional simulations of atmospheric pressure rf-excited plasma with two concentric spherical electrodes and the inner electrode powered. The gas used is helium with 0.1% nitrogen addition. The gap distance between the inner and outer electrodes is 1 mm. The coupled continuity...

  • Evading surface and detector frequency noise in harmonic oscillator measurements of force gradients. Moore, Eric W.; SangGap Lee; Hickman, Steven A.; Harrell, Lee E.; Marohn, John A. // Applied Physics Letters;7/26/2010, Vol. 97 Issue 4, p044105 

    We introduce and demonstrate a method of measuring small force gradients acting on a harmonic oscillator in which the force-gradient signal of interest is used to parametrically up-convert a forced oscillation below resonance into an amplitude signal at the oscillator’s resonance...

  • The role of the relative voltage and phase for frequency coupling in a dual-frequency capacitively coupled plasma. O'Connell, D.; Gans, T.; Semmler, E.; Awakowicz, P. // Applied Physics Letters;8/25/2008, Vol. 93 Issue 8, p081502 

    Frequency coupling in multifrequency discharges is a complex nonlinear interaction of the different frequency components. An alpha-mode low pressure rf capacitively coupled plasma operated simultaneously with two frequencies is investigated and the coupling of the two frequencies is observed to...

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics