TITLE

In-line extreme ultraviolet polarizer with hybrid configuration

AUTHOR(S)
Yang, Minghong; Tong, Xinling; Sun, Yan; Jiang, Desheng; Zhou, Ciming; Zhang, Dongsheng
PUB. DATE
March 2009
SOURCE
Review of Scientific Instruments;Mar2009, Vol. 80 Issue 3, p033105
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A novel hybrid Au-multilayer-Au in-line extreme ultraviolet (EUV) optical polarizer is presented in this paper. Different from all-Mo/Si multilayer EUV polarizer, this polarizer is based on the concept that Au surfaces work as reflecting elements for in-line optics routine, while polarization effect is realized by polarizing multilayer. Simulation shows that the proposed polarizer with 80°-70°-80° angle configuration has about 30% of transmission and 12 eV of bandwidth half maximum, which enables more throughput and broader bandwidth than the all-multilayer one.
ACCESSION #
37259512

 

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