TITLE

The role of carrier gases in the production of metastable argon atoms in a rf discharge

AUTHOR(S)
Rudinger, Kenneth; Lu, Zheng-Tian; Mueller, Peter
PUB. DATE
March 2009
SOURCE
Review of Scientific Instruments;Mar2009, Vol. 80 Issue 3, p036105
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We investigate the role of carrier gases in the production of metastable argon atoms in a rf-driven discharge. The effects of different carrier gases (krypton, xenon, neon, and helium), carrier gas pressures, and rf discharge powers are examined. A xenon carrier gas provides the greatest metastable population of argon, yielding an optimal fractional metastable population of argon (Ar*/Ar) of 2×10-4 at 0.2 mTorr of xenon gas. The optimal krypton configuration yields 60% of the xenon-supported population at 1.5 times higher pressure. Neon and helium perform considerably worse probably due to their higher ionization potentials.
ACCESSION #
37259475

 

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