TITLE

Phase stability of cubic Mg0.55Zn0.45O thin film studied by continuous thermal annealing method

AUTHOR(S)
Ju, Z. G.; Shan, C. X.; Yang, C. L.; Zhang, J. Y.; Yao, B.; Zhao, D. X.; Shen, D. Z.; Fan, X. W.
PUB. DATE
March 2009
SOURCE
Applied Physics Letters;3/9/2009, Vol. 94 Issue 10, pN.PAG
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The phase stability of cubic Mg0.55Zn0.45O thin film grown by metal-organic chemical vapor deposition was studied through continuous thermal annealing. The crystal quality and surface smoothness were greatly improved after a continuous thermal annealing at 750 °C. It is attributed to the reducing of interstitial Zn by thermal annealing. However, phase segregation occurred when the sample was annealed at a higher temperature (850 °C), which is identified from both x-ray diffraction patterns and optical transmission spectra.
ACCESSION #
37043757

 

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