Self-separated hydrothermal lead zirconate titanate thick films for high frequency transducer applications

Zhu, B. P.; Zhou, Q. F.; Shi, J.; Shung, K. K.; Irisawa, S.; Takeuchi, S.
March 2009
Applied Physics Letters;3/9/2009, Vol. 94 Issue 10, pN.PAG
Academic Journal
Using a simple rapid heating process, Pb(Zr0.52Ti0.48)O3 (PZT) thick films prepared by hydrothermal method were separated from a Ti substrate. Scanning electron microscopy (SEM) revealed that the self-separated films were crack-free. After solution infiltration and high temperature annealing, the PZT thick films were shown to possess good electric properties. At 1 kHz, the dielectric constant and the loss were 593 and 0.05, respectively. The remnant polarization was 30.0 μC/cm2 at room temperature. A high frequency single element ultrasound transducer fabricated with these films showed a bandwidth at -6 dB of 73% at a center frequency of 67 MHz.


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