Temporal structure of electron heating in asymmetric single-frequency and dual-frequency capacitive discharges

Ziegler, D.; Mussenbrock, T.; Brinkmann, R. P.
February 2009
Physics of Plasmas;Feb2009, Vol. 16 Issue 2, pN.PAG
Academic Journal
The power dissipation in asymmetric capacitively coupled low-pressure plasmas can be drastically enhanced by the self-excitation of collective resonances. This applies to both Ohmic heating, which is related to collisions of electrons with neutrals, and stochastic heating which reflects the energy transfer from the oscillating plasma boundary sheath to the electrons. This work studies the phase-resolved structure of the power dissipation in asymmetric single-frequency and dual-frequency discharges on the basis of a self-consistent global model. A resonance-free global model (which represents the “traditional” scenario of the heating process) is consulted for comparison. It is shown that the energy dissipation in asymmetric capacitive discharges is enhanced around the moment of the sheath collapse but assumes the nonresonant value when the sheath extension is large. In the dual-frequency case, the effect is synchronized with the low-frequency cycle but strongly dependent on the value of the high-frequency power.


Related Articles

  • Dissipation scales in the Earth's plasma sheet estimated from Cluster measurements. Vörös, Z.; Baumjohann, W.; Nakamura, R.; Runov, A.; Volwerk, M.; Schwarzl, H.; Balogh, A.; Rème, H.; Vassiliadis, D.; Treumann, R. // Nonlinear Processes in Geophysics;2005, Vol. 12 Issue 5, p725 

    In order to estimate the dissipation time-scale in magnetic turbulence in the plasma sheet a novel method is introduced for classification of velocity dependent patterns of two-point probability density functions' shapes near their maxima. For the first time, we provide evidence for Reynolds...

  • Dissipation of the Energy of a Fast Charged Particle in a Solid-State Plasma. Zhurenko, V. P.; Kononenko, S. I.; Karas�, V. I.; Muratov, V. I. // Plasma Physics Reports;Feb2003, Vol. 29 Issue 2, p130 

    Results are presented from experimental investigations of mechanisms for the dissipation of the energy of light ions in metal plasmas by using the method of secondary electron emission. It is shown that the coefficient of anisotropy of energy transfer from fast light ions is about 1.7. It is...

  • Flux limiting due to electron impact excitation energy loss. Catto, Peter J.; Krasheninnikov, Sergei // Physics of Plasmas;Feb96, Vol. 3 Issue 2, p461 

    Shows that large radiation losses in the electron energy balance equation due to electron impact excitation can cause the parallel scale length. Inclusion of an inelastic impact excitation operator to generate a steepening of the profile consistent with energy loss by line radiation...

  • Characteristics of gravitationally affected colloidal plasma sheath. Rajkhowa, Kavita Rani; Ramachandran, H. // Physics of Plasmas;Mar2004, Vol. 11 Issue 3, p1203 

    The presence of massive dust grains modifies the flow structures of plasma species in presheath and sheath regions as well as the nature of boundary conditions at the sheath edge. The work presents a one-dimensional approach to study the plasma sheath profiles in the presheath and sheath regions...

  • Modelling of dusty plasmas: A+M data needs. Goedheer, W. J.; De Bleecker, K. // AIP Conference Proceedings;2005, Vol. 771 Issue 1, p118 

    Processing plasmas often produce clusters, ranging in size from a few nanometer up to micrometers. Due to their negative charge, clusters are confined by the sheath electric fields until their mass enables gravity to pull them out of the discharge. Examples are discharges in SiH4 or C2H2....

  • Plasma-sheath instability in Hall thrusters due to periodic modulation of the energy of secondary electrons in cyclotron motion. Sydorenko, D.; Smolyakov, A.; Kaganovich, I.; Raitses, Y. // Physics of Plasmas;May2008, Vol. 15 Issue 5, p053506 

    Particle-in-cell simulation of Hall thruster plasmas reveals a plasma-sheath instability manifesting itself as a rearrangement of the plasma sheath near the thruster channel walls accompanied by a sudden change of many discharge parameters. The instability develops when the sheath current as a...

  • Study of electron behavior in a pulsed ion sheath. Kar, S.; Mukherjee, S. // Physics of Plasmas;Jun2008, Vol. 15 Issue 6, p063504 

    In many plasma processing applications, like plasma immersion ion implantation (PIII), the substrate is immersed in low pressure plasma and is biased with negative voltage pulses. In typical PIII, the pulse duration is much larger than the ion response time, and hence the ion matrix sheath...

  • The dust motion inside the magnetized sheath—The effect of drag forces. Pandey, B. P.; Samarian, A.; Vladimirov, S. V. // Physics of Plasmas;Aug2010, Vol. 17 Issue 8, p083701 

    The isolated charged dust inside the magnetized plasma sheath moves under the influence of the electron and ion drag force and the sheath electrostatic field. The charge on the dust is a function of its radius as well as the value of the ambient sheath potential. It is shown that the charge on...

  • Sheath and presheath in ion-ion plasmas via particle-in-cell simulation. Meige, A.; Leray, G.; Raimbault, J.-L.; Chabert, P. // Applied Physics Letters;2/11/2008, Vol. 92 Issue 6, p061501 

    A full particle-in-cell simulation is developed to investigate electron-free plasmas constituted of positive and negative ions under the influence of a dc bias voltage. It is shown that high-voltage sheaths following the classical Child-law sheaths form within a few microseconds (which...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics