TITLE

The effects of carbon coating on nanoripples induced by focused ion beam

AUTHOR(S)
Guang Ran; Jiaming Zhang; Qiangmin Wei; Shengqi Xi; Xiaotao Zu; Lumin Wang
PUB. DATE
February 2009
SOURCE
Applied Physics Letters;2/16/2009, Vol. 94 Issue 7, pN.PAG
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The morphology and topography of self-assembled nanoripple structures on LaAlO3 (100) surface with and without carbon coating were characterized using focused ion beam (FIB)/scanning electron microscope, as well as ex situ atomic force microscopy and transmission electron microscopy. When the surface was not covered by carbon coating and had low roughness, well-ordered and highly uniform nanoripples self-assembled on the surface bombarded by FIB. In contrast, disordered nanoripples formed after carbon coating. The deposited carbon significantly influences the morphology of surface nanoripples due to its effect on the surface roughness that affect the dynamic competition between the roughening and smoothing processes. This discovery suggests a means for fabricating well-ordered and highly uniform nanoripples for nanoscale devices application.
ACCESSION #
36797982

 

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