TITLE

Thin-film characterization by terahertz time-domain spectroscopy using grating-assisted excitation of guided modes

AUTHOR(S)
Laamiri, Y.; Garet, F.; Coutaz, J.-L.
PUB. DATE
February 2009
SOURCE
Applied Physics Letters;2/16/2009, Vol. 94 Issue 7, pN.PAG
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Using a grating coupler, the guided modes of a dielectric slab can be efficiently excited by a terahertz beam delivered by a classical terahertz time-domain setup. By analyzing the variation in the transmission spectrum induced by a thin film deposited over the device, the refractive index as well as the absorption coefficient of the film material can be determined with a great accuracy because of the increased interaction length with the guided terahertz signal. The principle of such a technique is demonstrated in the case of a 7.1 μm thick film of Shipley 1828 photoresist.
ACCESSION #
36797974

 

Related Articles

  • Tuning a terahertz wire laser. Qi Qin; Williams, Benjamin S.; Kumar, Sushil; Reno, John L.; Qing Hu // Nature Photonics;Dec2009, Vol. 3 Issue 12, p732 

    Tunable terahertz lasers are desirable in applications in sensing and spectroscopy because many biochemical species have strong spectral fingerprints at terahertz frequencies. Conventionally, the frequency of a laser is tuned in a similar manner to a stringed musical instrument, in which pitch...

  • Terahertz waveguide emitter with subwavelength confinement. Martl, Michael; Darmo, Juraj; Dietze, Daniel; Unterrainer, Karl; Gornik, Erich // Journal of Applied Physics;Jan2010, Vol. 107 Issue 1, p013110-1 

    The generation of broadband terahertz pulses on the facet of waveguides is presented as an alternative to widely used coupling techniques. Dielectric loaded subwavelength waveguide structures with lateral confinement are investigated with respect to propagating modes and waveguide losses. The...

  • Dielectric response of soft mode in ferroelectric SrTiO3. Jiaguang Han; Fan Wan; Zhiyuan Zhu; Weili Zhang // Applied Physics Letters;1/15/2007, Vol. 90 Issue 3, p031104 

    The authors report far-infrared dielectric properties of powder form ferroelectric SrTiO3. Terahertz time-domain spectroscopy (TDS) measurement reveals that the low-frequency dielectric response of SrTiO3 is a consequence of the lowest transverse optical (TO) soft mode TO1 at 2.70 THz (90.0...

  • Study of L-shaped resonators at terahertz frequencies. Liu, Jianfeng; Zhou, Qingli; Shi, Yulei; Zhao, Xu; Zhang, Cunlin // Applied Physics Letters;12/9/2013, Vol. 103 Issue 24, p241911 

    In experimental and theoretical studies of terahertz subwavelength 'L'-shaped structure, we proposed an unusual-mode current resonance responsible for low-frequency characteristic dip in transmission spectra. Comparing spectral properties of our designed simplified structures with that of...

  • Kelvin force microscopy characterization of charging effect in thin a-SiOxNy:H layers deposited in pulsed plasma enhanced chemical vapor deposition process by tuning the Silicon-environment. Villeneuve-Faure, C.; Makasheva, K.; Bonafos, C.; Despax, B.; Boudou, L.; Pons, P.; Teyssedre, G. // Journal of Applied Physics;May2013, Vol. 113 Issue 20, p204102 

    Results from a study on the charging effect of a-SiOxNy:H thin layers are presented in this paper. Issues related to structural and electrical characterization of these layers are discussed. Spectroscopic ellipsometry was used to determine accurately the layer thickness and their optical...

  • Broadband dielectric spectroscopy of Ruddlesden–Popper Srn+1TinO3n+1 (n=1,2,3) thin films. Orloff, N. D.; Tian, W.; Fennie, C. J.; Lee, C. H.; Gu, D.; Mateu, J.; Xi, X. X.; Rabe, K. M.; Schlom, D. G.; Takeuchi, I.; Booth, J. C. // Applied Physics Letters;1/26/2009, Vol. 94 Issue 4, pN.PAG 

    We explore the frequency-dependent relative permittivity of Ruddlesden–Popper series Srn+1TinO3n+1 (n=1,2,3) thin films as a function of temperature and dc electric field. Interdigitated capacitors and coplanar waveguides were used to extract the frequency response from 500 Hz to 40 GHz....

  • Superimposed coherent terahertz wave radiation from mono-energetically bunched multi-beam. Shin, Young-Min // Physics of Plasmas;Jun2012, Vol. 19 Issue 6, p063115 

    Intense coherent radiation is obtained from multiple electron beams monochromatically bunched over the wide higher-order-mode (HOM) spectral band in the THz regime. The overmoded waveguide corrugated by dielectric-implanted staggered gratings superimposes evanescent waves emitted from the low...

  • NEW WAVES: MICROWAVE MATERIALS.  // Microwave Journal;Jul2004, Vol. 47 Issue 7, p140 

    This article presents information about various microwave materials. The WB series of dry photoresist is an attractive alternative for wafer bumping versus liquid resists. A range of WB dry photoresist thicknesses and formulations are available for use in lead-free, photostencil and standard...

  • Mechanisms for improving sub-90nm etch processing. Bosch, Bill; LaCara, Judy // Solid State Technology;Jul2004, Vol. 47 Issue 7, p123 

    Focuses on the development of a recipes capable of preserving the photoresist throughout the entire etch processing. Details on the processing challenges for etch; Alternative means for achieving selectivity and minimizing resist distortion; Utilization of the majority of dielectric etch...

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics