Thin-film characterization by terahertz time-domain spectroscopy using grating-assisted excitation of guided modes

Laamiri, Y.; Garet, F.; Coutaz, J.-L.
February 2009
Applied Physics Letters;2/16/2009, Vol. 94 Issue 7, pN.PAG
Academic Journal
Using a grating coupler, the guided modes of a dielectric slab can be efficiently excited by a terahertz beam delivered by a classical terahertz time-domain setup. By analyzing the variation in the transmission spectrum induced by a thin film deposited over the device, the refractive index as well as the absorption coefficient of the film material can be determined with a great accuracy because of the increased interaction length with the guided terahertz signal. The principle of such a technique is demonstrated in the case of a 7.1 μm thick film of Shipley 1828 photoresist.


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