TITLE

Diffusion and interaction studied nondestructively and in real-time with depth-resolved low energy ion spectroscopy

AUTHOR(S)
de Rooij-Lohmann, V. I. T. A.; Kleyn, A. W.; Bijkerk, F.; Brongersma, H. H.; Yakshin, A. E.
PUB. DATE
February 2009
SOURCE
Applied Physics Letters;2/9/2009, Vol. 94 Issue 6, pN.PAG
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
An analysis procedure was developed that enables studying diffusion in ultrathin films by utilizing the depth-resolved information that is contained in the background of low energy ion scattering (LEIS) spectra. Using a high-sensitivity analyzer/detector combination allows for such a low ion dose that the ion-induced perturbation caused by this technique is negligible and not measurable with LEIS. The developed analysis procedure provides a unique opportunity to study diffusion processes in nanoscaled systems. It was applied to the Mo/Si system, a system that is relevant for extreme ultraviolet optics.
ACCESSION #
36609522

 

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