Size effect of dissipative surface stress on quality factor of microbeams

Ru, C. Q.
February 2009
Applied Physics Letters;2/2/2009, Vol. 94 Issue 5, pN.PAG
Academic Journal
A dissipative surface stress model is suggested to study the surface dissipation of vibrating elastic microbeams. The model is an extension of the well-known Zener model from bulk materials to the surface in the presence of an initial surface tension. Explicit formulas are derived for the frequency-dependent quality factor and the maximum surface dissipation. This model predicts a size-dependent surface dissipation when the size of the cross section downs to nanometers. In particular, the model offers plausible explanation for a few experimental phenomena reported in the most recent literature.


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