Phase identification of self-forming Cu–Mn based diffusion barriers on p-SiOC:H and SiO2 dielectrics using x-ray absorption fine structure

Ablett, J. M.; Woicik, J. C.; Tőkei, Zs.; List, S.; Dimasi, E.
January 2009
Applied Physics Letters;1/26/2009, Vol. 94 Issue 4, pN.PAG
Academic Journal
X-ray absorption fine structure spectroscopy has been used to study the chemical and structural properties of self-forming diffusion barrier layers from Cu-8 at. % Mn alloy films on porous low-k and thermally grown SiO2 dielectrics. For the porous low-k/Cu(Mn) system, we provide evidence that the interface is composed of MnSiO3 and MnO with near complete Mn segregation from the alloy film; however, we find that the self-forming process does not go to full completion on thermally grown SiO2 substrates.


Related Articles

  • Ab Initio Calculation of XAFS Debye-Waller Factors for Crystalline Materials. Dimakis, Nicholas // AIP Conference Proceedings;2007, Vol. 882 Issue 1, p126 

    A direct an accurate technique for calculating the thermal X-ray absorption fine structure (XAFS) Debye-Waller factors (DWF) for materials of crystalline structure is presented. Using the Density Functional Theory (DFT) under the hybrid X3LYP functional, a library of MnO spin—optimized...

  • Investigation of Room Temperature Oxidation of Cu in Air by Yoneda-XAFS. Keil, P.; Lützenkirchen-Hecht, D.; Frahm, R. // AIP Conference Proceedings;2007, Vol. 882 Issue 1, p490 

    The structure of thin copper oxide layers which are formed on metallic Cu due to the exposure to air are investigated with Yoneda-XAFS and ReflEXAFS. The measured Yoneda-XAFS data were compared to quantitative model calculations in the framework of the distorted wave Born approximation (DWBA)...

  • Mn L2,3 x-ray absorption spectra of a diluted Mn–Ge alloy. Ottaviano, L.; Passacantando, M.; Verna, A.; D’Amico, F.; Gunnella, R. // Applied Physics Letters;6/11/2007, Vol. 90 Issue 24, p242105 

    An ion implanted Mn–Ge(100) alloy has been fabricated with a 30 nm subsurface layer of disorderly diluted Mn atoms, which settle all in substitutional lattice sites after 400 °C annealing in vacuum. The Mn L2,3 x-ray absorption spectroscopy of the disordered Mn implanted alloy is...

  • Unraveling the Structure of Mn-Promoted Co/TiO2 Fischer-Tropsch Catalysts by In Situ X-Ray Absorption Spectroscopy. Grandjean, Didier; Morales, Fernando; Mens, Ad; de Groot, Frank M. F.; Weckhuysen, Bert M. // AIP Conference Proceedings;2007, Vol. 882 Issue 1, p666 

    Combination of in situ X-ray absorption spectroscopy (XAFS) at the Co and Mn K-edges with electron microscopy (STEM-EELS) has allowed to unravel the complex structure of a series of unpromoted and Mn promoted TiO2-supported cobalt Fischer-Tropsch catalysts prepared by homogeneous deposition...

  • Speciation of Raney Copper Oxide during High-Temperature Desulfurization. Wang, T. C.; Wang, H. Paul; Chen, C. Y.; Huang, Hsin-Liang; Wei, Yu-Ling // AIP Conference Proceedings;2007, Vol. 882 Issue 1, p705 

    Speciation of copper in the Raney copper oxides (R-CuO) during high-temperature desulfurization has been studied by X-ray absorption spectroscopy. The preedge XANES spectra (8975–8979 eV) of R-CuO exhibit a very weak 1s-to-3d transition forbidden by the selection rule in the case of the...

  • Thermal activation effect on catalytic systems MnO x /Al2O3 for deep oxidation of hydrocarbons. Tsyrul'nikov, P. G. // Russian Journal of General Chemistry;Dec2007, Vol. 77 Issue 12, p2328 

    The effect of thermal activation, sharp increase in the catalytic activity of the system MnO x -Al2O3 in reactions of deep oxidation of CO and hydrocarbons after calcination of the catalyst at 900–1000°C was discovered and investigated. With the use of X-ray phase analysis, X-ray...

  • Real-Time Observation of Platinum Redispersion on Ceria-Based Oxide by In-situ Turbo-XAS in Fluorescence Mode. Nagai, Yasutaka; Takagi, Nobuyuki; Ikeda, Yasuo; Dohmae, Kazuhiko; Tanabe, Toshitaka; Guilera, Gemma; Pascarelli, Sakura; Newton, Mark; Shinjoh, Hirofumi; Matsumoto, Shin’ichi // AIP Conference Proceedings;2007, Vol. 882 Issue 1, p594 

    A real-time observation of the redispersion behavior of sintered Pt on ceria-based oxide was made possible by in-situ time-resolved Turbo-XAS in fluorescence mode. 2 wt% Pt/Ce-Zr-Y mixed oxide samples were prepared, and then treated under an aging condition. The average Pt particle size measured...

  • EXAFS Study of Disorder in SrTiO3 Perovskite. Kodre, Alojz; Arcˇon, Iztok; Gomilsˇek, Jana Padezˇnik; Zalar, Bosˇtjan // AIP Conference Proceedings;2007, Vol. 882 Issue 1, p481 

    Ti K-edge EXAFS spectra of SrTiO3 at room temperature and at N2 boiling point are measured to detect the Ti ion displacement above and below the antiferrodistortive phase transition occurring at Tc = 105 K. The data yield a definite value of the displacement, only slightly dependent on the...

  • Molecular Study of Thermal Immobilization of Chromium(VI) with Clay. Yu-Ling Wei; Huei-Fang Hsieh; Yao-Wen Yang; Jyh-Fu Lee; Wei-Shun Liang // Journal of the Air & Waste Management Association (Air & Waste M;Apr2005, Vol. 55 Issue 4, p411 

    Clay that contains kaolinite has been used extensively as a raw material for manufacturing of bricks and china at 900-1100 °C. This study used clay to stabilize the contaminant chromium(VI) [Cr(VI)] through a heating process at 500-1100 °C. X-ray absorption spectroscopic results indicated...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics