Three dimensional metal pattern transfer for replica molded microstructures

Zhao, Yanzhu; Yoon, Yong-Kyu; Choi, Seong-O; Wu, Xiaosong; Liu, Zhan; Allen, Mark G.
January 2009
Applied Physics Letters;1/12/2009, Vol. 94 Issue 2, pN.PAG
Academic Journal
We report a replica molding process for simultaneously forming a three dimensional metal pattern on the surface of molded polymer microstructures. This technique uses noncovalent surface forces to guide the transfer of thin metal films from the three dimensional features of high aspect ratio poly(dimethylsiloxane) micromolds to polymeric replicates. The utility of this technique has been demonstrated by the fabrication of organic coplanar waveguides integrated with vertical Ka-band monopole antenna radiators. These microwave systems show good performance with over 18% bandwidth and greater than 16 dB return loss, demonstrating the versatility of this process.


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