TITLE

Control of cavity cross section in microplasma devices: Luminance and temporal response of 200×100 and 320×160 arrays with parabolic Al2O3 microcavities

AUTHOR(S)
Kim, K. S.; Kim, T. L.; Yoon, J. K.; Park, S.-J.; Eden, J. G.
PUB. DATE
January 2009
SOURCE
Applied Physics Letters;1/5/2009, Vol. 94 Issue 1, p011503
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Intense green luminance and luminous efficacies approaching 4 lm/W have been observed for large (50×50 to 320×160) arrays of microplasma devices with parabolic cross-sectional Al2O3 microcavities and conformal aluminum electrodes, operating in Ne/Xe gas mixtures. Precise control of the cross-sectional geometry and surface morphology of the cavities within Al/Al2O3 microplasma devices having a dielectric barrier structure has been achieved with a sequence of wet electrochemical processes. Continuous variation of the cavity cross section between a linear taper and parabolic geometry can be specified and all dimensions controlled to within ±2%. Aluminum electrodes encompassing each cavity are azimuthally symmetric and the inner face of each electrode is conformal to the Al2O3 microcavity wall. Arrays comprising 20 000 devices (in a 200×100 configuration) with a parabolic microcavity wall profile and an emitting aperture 160±2 μm in diameter produce a green luminance >1800 cd/m2 and a peak luminous efficacy of 3.9 lm/W in Ne/30% Xe gas mixtures at a total pressure of 500 Torr. Temporal response measurements show the visible emission rise time of 200–250 ns to be limited only by the rise time of the voltage waveform itself.
ACCESSION #
36178192

 

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