Electron heating in radio-frequency capacitively coupled atmospheric-pressure plasmas

Liu, D. W.; Iza, F.; Kong, M. G.
December 2008
Applied Physics Letters;12/29/2008, Vol. 93 Issue 26, p261503
Academic Journal
In atmospheric-pressure plasmas the main electron heating mechanism is Ohmic heating, which has distinct spatial and temporal evolutions in the α and γ modes. In γ discharges, ionizing avalanches in the sheaths are initiated not only by secondary electrons but also by metastable pooling reactions. In α discharges, heating takes place at the sheath edges and in contrast with low-pressure plasmas, close to 50% of the power absorbed by the electrons is absorbed at the edge of the retreating sheaths. This heating is due to a field enhancement caused by the large collisionality in atmospheric-pressure discharges.


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