Nanolubrication of poly(methyl methacrylate) films on Si for microelectromechanical systems applications

Satyanarayana, N.; Lau, K. H.; Sinha, S. K.
December 2008
Applied Physics Letters;12/29/2008, Vol. 93 Issue 26, p261906
Academic Journal
Polymers, such as poly(methyl methacrylate) (PMMA), are important structural materials for microsystems because of their excellent mechanical properties; however, they suffer from severe problems of adhesion, friction, and wear [B. Bhushan, J. N. Israelachvili, and U. Landman, Nature (London) 374, 607 (1995)]. We report a simple process of O2 plasma treatment on a PMMA film, followed by overcoating with an ultrathin layer of perfluoropolyether (PFPE) which improved tribological performance of the film. O2 plasma on PMMA film has formed unique wavy nanotextured surface and increased the hardness and the elastic modulus of the film, which, together with the nanolurbication by PFPE, has increased the wear life of PMMA film by more than five orders of magnitude.


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