TITLE

Polarimetric interferometer for nanoscale positioning applications

AUTHOR(S)
Xu, S.; Ouedraogo, K.; Chassagne, L.; Topçu, S.; Juncar, P.; Alayli, Y.
PUB. DATE
December 2008
SOURCE
Review of Scientific Instruments;Dec2008, Vol. 79 Issue 12, p125104
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We propose and demonstrate a displacement control method at the subnanometric scale based on a Michelson interferometer combined with a polarimeter and a phase-locked loop electronic board. Step by step displacements with a step value of 5 nm are presented. A repeatability of 0.47 nm is obtained from back and forth displacements over 1 μm range. We show that a residual ellipticity of less than 10° on the polarization state leads to a positioning error of less than 1 nm. Such system could be used over millimeter range displacements in a controlled surrounding environment leading to numerous applications in nanometrology.
ACCESSION #
35982682

 

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