Depth-resolved soft x-ray photoelectron emission microscopy in nanostructures via standing-wave excited photoemission

Kronast, F.; Ovsyannikov, R.; Kaiser, A.; Wiemann, C.; Yang, S.-H.; Bürgler, D. E.; Schreiber, R.; Salmassi, F.; Fischer, P.; Dűrr, H. A.; Schneider, C. M.; Eberhardt, W.; Fadley, C. S.
December 2008
Applied Physics Letters;12/15/2008, Vol. 93 Issue 24, p243116
Academic Journal
We extend conventional laterally-resolved soft x-ray photoelectron emission microscopy to provide depth resolution along the surface normal down to a few angstroms. This is achieved by using standing-wave excitation. The sample is a Ag/Co/Au trilayer, grown on a Si/MoSi2 multilayer mirror, with the bottom Ag layer in a wedge profile. Tuning the incident x-ray to the mirror Bragg angle sets up a standing x-ray wave field in the multilayer and the trilayer wedge structure. We demonstrate the resulting depth resolution by imaging the standing-wave fields as they move through the trilayer wedge structure.


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