Ultrafast laser direct-write actuable microstructures

Tapalian, H, Charles; Langseth, Jason; Ying Chen; Anderegg, James W.; Shinar, Joseph
December 2008
Applied Physics Letters;12/15/2008, Vol. 93 Issue 24, p243304
Academic Journal
Actuable microelectromechanical systems (MEMS), fabricated by direct “writing” of deformable membranes on indium tin oxide/copper phthalocyanine (CuPc)/Al microstructures using 130 fs laser pulses, are described. The pulses locally ablate the CuPc without requiring micromachined release holes, demonstrating a novel material release mechanism. The direct-write procedure therefore requires fewer processing steps than traditional MEMS approaches. Using it, we fabricated optical modulators with phase modulation depths >π, intensity modulation amplitudes >50%, and bandwidths >100 kHz, at 5–10 V drive voltage. Fabrication of numerous microstructures and nanostructures can be envisioned, including photonic crystals and optical phased-array gratings.


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