TITLE

Observation of collisionless heating of low energy electrons in low pressure inductively coupled argon plasmas

AUTHOR(S)
Min-Hyong Lee; Hyo-Chang Lee; Chin-Wook Chung
PUB. DATE
December 2008
SOURCE
Applied Physics Letters;12/8/2008, Vol. 93 Issue 23, p231503
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Collisionless heating of low energy electrons was observed in low pressure argon rf-biased inductively coupled plasmas (ICPs) by measurement of the electron energy distribution function (EEDF). When only capacitive power (bias) was supplied, the EEDF in the discharge was a bi-Maxwellian distribution with two electron groups. It was found that the low energy electrons were heated up significantly even with a little inductive power (<20 W) even when the discharge was in E mode. Due to the low gas pressure and low temperature of low energy electrons (close to the energy of the Ramsauer minimum), the collisional heating of low energy electrons appears to be negligible. Therefore, this effective heating of the low energy electrons showed a direct experimental evidence of the collisionless heating by inductive field. The significant heating of low energy electrons in E mode indicates that collisionless heating in the skin layer is an important electron heating mechanism of low pressure ICP even when the discharge is in E mode.
ACCESSION #
35886513

 

Related Articles

  • On the magnitude and sign of the anode potential fall in a gas discharge. Tsendin, L. // Technical Physics;Nov2011, Vol. 56 Issue 11, p1693 

    The magnitude and sign of the anode potential fall are determined primarily by the electron kinetics. In the high-current mode, in which electron-electron collisions determine the Maxwell distribution function, the anode has a negative charge relative to the plasma; due to the depletion of the...

  • Collisionless damping of geodesic acoustic mode in plasma with nonextensive distribution. Hui-Bin Qiu; Hai-Ying Song; Shi-Bing Liu // Physics of Plasmas;Jun2014, Vol. 21 Issue 6, p1 

    Geodesic acoustic mode (GAM) in collisionless toroidal plasmas with a constant electrostatic potential around a magnetic surface is investigated based on the linear gyrokinetic theory in context of nonextensive statistics mechanics. The damping rate of GAM is shown to be dependent on the...

  • Finite-Larmor-radius kinetic theory of a magnetized plasma in the macroscopic flow reference frame. Ramos, J. J. // Physics of Plasmas;Aug2008, Vol. 15 Issue 8, p082106 

    A straightforward operator method is used to derive a form of the drift-kinetic equation for a collisionless plasma species in the moving reference frame of its macroscopic flow. This equation is valid for sonic time scales and flow velocities, with first-order finite-Larmor-radius effects...

  • A different approach to obtain Mayer's extension to stationary single particle Wigner distribution. Bose, Anirban; Janaki, M. S. // Physics of Plasmas;Jul2012, Vol. 19 Issue 7, p072101 

    It is shown that the stationary collisionless single-particle Wigner equation in one dimension containing quantum corrections at the lowest order is satisfied by a distribution function that is similar in form to the Maxwellian distribution with an effective mass and a generalized potential. The...

  • Method to determine argon metastable number density and plasma electron temperature from spectral emission originating from four 4p argon levels. Mariotti, Davide; Shimizu, Yoshiki; Sasaki, Takeshi; Koshizaki, Naoto // Applied Physics Letters;11/13/2006, Vol. 89 Issue 20, p201502 

    A simple model and method is proposed here to determine argon metastable number densities and electron temperature with the assumption of a Maxwell-Boltzmann electron energy distribution. This method is based on the availability of experimental relative emission intensities of only four argon...

  • Alpha to gamma mode transition in hydrogen capacitive radio-frequency discharge. Abdel-Fattah, E.; Farag, Omar F. // Canadian Journal of Physics;Dec2013, Vol. 91 Issue 12, p1062 

    Electron energy distribution functions (EEDFs) were measured with increasing discharge voltages in hydrogen capacitively coupled plasmas by means of radio-frequency compensated Langmuir probe. The results are compared with EEDF in argon plasmas. It was found that, in the hydrogen capacitive...

  • Feature of electron energy distribution in a low-pressure capacitive discharge. You, S. J.; Chung, C. W.; Chang, H. Y. // Applied Physics Letters;7/25/2005, Vol. 87 Issue 4, p041501 

    The evolution of the electron energy distribution function is investigated in the low-pressure capacitive discharge under the collisionless electron heating regime, where the electron mean-free path is comparable to or larger than the system length. As the gas pressure decreases from 50 to 10...

  • Highly rarefied two-dimensional jet impingement on a flat plate. Khasawneh, Khaleel; Liu, Hongli; Cai, Chunpei // Physics of Fluids;Nov2010, Vol. 22 Issue 11, p117101 

    In this paper, we investigate highly rarefied jet gas flows out of a two-dimensional slit that impinges on a flat plate which is set vertically to the plume flow direction. The plate is assumed to be completely diffusive and the gaseous plume flow out of the slit is modeled with a Maxwellian...

  • Variation of the electron energy distribution with He dilution in an inductively coupled argon discharge. Lee, Hyo-Chang; Chung, Chin-Wook // Physics of Plasmas;Apr2012, Vol. 19 Issue 4, p043505 

    We present experimental evidence of different behaviors of plasma parameters depending on changes in the electron energy distribution (EED), caused by an electron heating mechanism and electron-neutral collision processes in an Ar/He mixture inductively coupled plasma. At a low gas pressure of 3...

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics