TITLE

Reduction in charged defects associated with oxygen vacancies in hafnia by magnesium incorporation: First-principles study

AUTHOR(S)
Umezawa, Naoto; Sato, Motoyuki; Shiraishi, Kenji
PUB. DATE
December 2008
SOURCE
Applied Physics Letters;12/1/2008, Vol. 93 Issue 22, p223104
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Charged defects in a gate insulating oxide significantly degrade electric properties of the field-effect transistors. We report on our analysis of the effects of Mg incorporation into HfO2 upon reduction in the positive charges associated with oxygen vacancies VO+2. Our comprehensive study using first-principles calculations revealed that a Mg atom substituted for Hf is stable in charge negative MgHf-2 and strongly binds with VO+2, neutralizing the defect. This contributes to the suppressing of the electron traps at the defect site, improving the reliability of Hf-based gate oxides.
ACCESSION #
35763893

 

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