Optimization of the size ratio of Sn sphere and laser focal spot for an extreme ultraviolet light source

Yuspeh, S.; Sequoia, K. L.; Tao, Y.; Tillack, M. S.; Burdt, R.; Najmabadi, F.
December 2008
Applied Physics Letters;12/1/2008, Vol. 93 Issue 22, p221503
Academic Journal
The effect of the ratio of Sn sphere diameter to laser focal spot size (SD/FSS) on conversion efficiency (CE) from laser to in-band (2%) 13.5 nm extreme ultraviolet (EUV) light was investigated by fixing the laser spot size and irradiating variable diameter spheres. It was found that a minimum SD/FSS, i.e., 2.5, is necessary to produce high in-band CE, which is 15% higher than planar targets. Two-dimensional plasma density profile maps showed that the density of the dominant in-band EUV emission region and the size of the surrounding absorbing plasma can be manipulated by geometric effects of the SD/FSS ratio.


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