Fabrication of submicron structures in nanoparticle/polymer composite by holographic lithography and reactive ion etching

Zhang, A. Ping; Sailing He; Kyoung Tae Kim; Yong-Kyu Yoon; Burzynski, Ryszard; Samoc, Marek; Prasad, Paras N.
November 2008
Applied Physics Letters;11/17/2008, Vol. 93 Issue 20, p203509
Academic Journal
We report on the fabrication of nanoparticle/polymer submicron structures by combining holographic lithography and reactive ion etching. Silica nanoparticles are uniformly dispersed in a (SU8) polymer matrix at a high concentration, and in situ polymerization (cross-linking) is used to form a nanoparticle/polymer composite. Another photosensitive SU8 layer cast upon the nanoparticle/SU8 composite layer is structured through holographic lithography, whose pattern is finally transferred to the nanoparticle/SU8 layer by the reactive ion etching process. Honeycomb structures in a submicron scale are experimentally realized in the nanoparticle/SU8 composite.


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