Nanocrystalline diamond lateral vacuum microtriode

Subramanian, K.; Kang, W. P.; Davidson, J. L.
November 2008
Applied Physics Letters;11/17/2008, Vol. 93 Issue 20, p203511
Academic Journal
A vacuum field emission microtriode in lateral configuration utilizing nanocrystalline diamond is presented. The nanodiamond lateral triode is a completely integrated device comprising a fingerlike emitter geometry with an ∼15 nm tip radius of curvature, built-in gate, and anode with gate-cathode spacing of 3 μm and anode-cathode spacing of 12 μm. Triode characteristics, demonstrating gate-controlled emission current modulation with an anode current of 4 μA and high transconductance of 0.3 μS from a single emitter-finger at low device voltages (Vg<40 V and Va∼65 V), are obtained. The anode-induced electron emission conforms to Fowler–Nordheim tunneling. These observations from the first diamond lateral vacuum microtriode demonstrate a robust device for integrated circuit-compatible, temperature-, and radiation-insensitive vacuum micro-nanoelectronics.


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