TITLE

Electron diffraction with ten nanometer beam size for strain analysis of nanodevices

AUTHOR(S)
Armigliato, A.; Frabboni, S.; Gazzadi, G. C.
PUB. DATE
October 2008
SOURCE
Applied Physics Letters;10/20/2008, Vol. 93 Issue 16, p161906
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A method to perform nanobeam diffraction (NBD) in a transmission electron microscope with high spatial resolution and low convergence angle is proposed. It is based on the use of a properly fabricated condenser aperture of 1 μm in diameter, which allows an electron beam about 10 nm in size to be focused on the sample, with a convergence angle in the 0.1 mrad range. Examples of NBD patterns taken in an untilted <110> cross section of a silicon device are shown. Their quality is adequate for spot position determination and hence to obtain, in principle, quantitative strain information.
ACCESSION #
35279335

 

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