TITLE

Growth and characterization of high-density mats of single-walled carbon nanotubes for interconnects

AUTHOR(S)
Robertson, J.; Zhong, G.; Telg, H.; Thomsen, C.; Warner, J. H.; Briggs, G. A. D.; Dettlaff-Weglikowska, U.; Roth, S.
PUB. DATE
October 2008
SOURCE
Applied Physics Letters;10/20/2008, Vol. 93 Issue 16, p163111
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We grow high-density, aligned single wall carbon nanotube mats for use as interconnects in integrated circuits by remote plasma chemical vapor deposition from a Fe–Al2O3 thin film catalyst. We carry out extensive Raman characterization of the resulting mats, and find that this catalyst system gives rise to a broad range of nanotube diameters, with no preferential selectivity of semiconducting tubes, but with at least 1/3 of metallic tubes.
ACCESSION #
35279314

 

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