Observations of gas-phase nanoparticles during InGaN metal-organic chemical vapor deposition

Creighton, J. Randall; Coltrin, Michael E.; Figiel, Jeffrey J.
October 2008
Applied Physics Letters;10/27/2008, Vol. 93 Issue 17, p171906
Academic Journal
Using in situ laser light scattering, we have directly observed the formation of gas-phase nanoparticles during InN and InGaN metal-organic chemical vapor deposition. The angular dependence of the light scattering intensity suggests that the nanoparticles are metallic In or InGa alloys. From the angle-resolved scattering profile, we determined that the particle diameters were in the range 20–50 nm, and particle densities were mostly in the 108–109 cm-3 range. Results indicate that for growth temperatures near 800 °C nearly 100% of the indium near the surface is converted into gas-phase nanoparticles and is no longer available for InGaN growth.


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